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DMF-41405
Digital mass flow controller, range 0-200 sccm. Specified flow range is for an equivalent flow of nitrogen at 70┬°F (21┬°C) @ 760 mm Hg.
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Product Specs
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| Accuracy | ± 1 % |
| Accuracy Note | ± 1% FS including linearity between 59 to 77°F (15 to 25°C) and 10 to 60 psia (0.7 to 4 bar); ± 2% FS from 32 to 122°F (0 to 50°C) and 5 to 150 psia (0.3 to 10 bar) |
| Compliance | CE |
| Data Interface | RS485 |
| Leak Rate Under Vacuum | less than 10^⁻9 cc He/s |
| Material Construction Option | 316 Stainless Steel |
| Materials, Wetted | 316 Stainless Steel, 416 Stainless Steel, Fluoroelastomer |
| Media Compatibility | Air, Argon, Carbon dioxide, Helium, Hydrogen, Nitrogen, Non-Corrosive Dry Gases, Oxygen |
| Operating Temperature, Max | 122 °F |
| Operating Temperature, Min | 41 °F |
| Output Detail | Linear 0-5 VDC (2000 Ω min. load impedance); 0-10 VDC (4000 Ω min. load impedance) |
| Output Signal | Voltage |
| Particulate Size, Max | 100 microns |
| Pressure Limits | Up to 500 psi |
| Pressure Type | Gauge |
| Process Connection Size | 1/4 in |
| Process Connection Type | Compression Fitting |
| Repeatability | ± 0.15% |
| Response Time | 0.6 to 1 s |
| Response Time Note | 0.6 to 1.0 second to within ± 2% of setpoint over 20% to 100% FS |
| Supply Power Type | DC |
| Supply Voltage | ± 15 Vdc |
| Volumetric Flow Rate, Max | 200 SCCM |
| Volumetric Flow Rate, Min | 0 SCCM |
| See All Specs | |
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