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Mass Flow Meters
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| Product Number | Electrical Output | Output Signal | Volumetric Flow Rate, Max |
|---|---|---|---|
|
|
0 to 5 V
|
Voltage
|
100 SLM
|
|
|
0 to 5 V
|
Voltage
|
0.5 SCCM
|
|
|
0 to 5 V
|
Voltage
|
1 SCCM
|
|
|
0 to 5 V
|
Voltage
|
10 SCCM
|
|
|
0 to 5 V
|
Voltage
|
50 SCCM
|
The FMA-2600A Series mass and volumetric flow controllers use the principle of differential pressure within a laminar flow field to determine and control mass flow rate.
| Product Number | Electrical Output | Operating Pressure, Max | Output Signal | Volumetric Flow Rate, Max |
|---|---|---|---|---|
|
|
0 to 5 V
|
145 psi
|
Voltage
|
0.5 SCCM
|
|
|
0 to 5 V
|
145 psi
|
Voltage
|
1 SCCM
|
|
|
0 to 5 V
|
145 psi
|
Voltage
|
10 SCCM
|
|
|
0 to 5 V
|
145 psi
|
Voltage
|
50 SCCM
|
|
|
0 to 5 V
|
145 psi
|
Voltage
|
2 SLM
|
The FMA5400A/5500A Series electronic gas mass flow controllers provide for controlling the flow of a wide variety of gases from 0-10 SCCM up to 100 SLM.
| Product Number | Accuracy | Display Type | Material Construction Option | Volumetric Flow Rate, Max |
|---|---|---|---|---|
|
|
± 1 %
|
LCD
|
Aluminum and Brass Body
|
50 SLM
|
|
|
± 1.5 %
|
None
|
Aluminum and Brass Body
|
200 SLM
|
|
|
± 1.5 %
|
None
|
Aluminum and Brass Body
|
500 SLM
|
|
|
± 1.5 %
|
None
|
Aluminum and Brass Body
|
1000 SLM
|
|
|
± 1.5 %
|
LCD
|
Aluminum and Brass Body
|
200 SLM
|
The FMA1700A/1800A provides measurement of direct gas mass flow rate without the need to compensate for variations in gas temperature or pressure (within stated limits).
| Product Number | Accuracy | Display Type | Material Construction Option | Volumetric Flow Rate, Max |
|---|---|---|---|---|
|
|
± 1.5 %
|
LCD
|
Aluminum and Brass Body
|
10 SLM
|
|
|
± 1.5 %
|
None
|
Aluminum and Brass Body
|
10 SCCM
|
|
|
± 1.5 %
|
None
|
Aluminum and Brass Body
|
20 SCCM
|
|
|
± 1.5 %
|
None
|
Aluminum and Brass Body
|
50 SCCM
|
|
|
± 1.5 %
|
None
|
Aluminum and Brass Body
|
100 SCCM
|
The FMA-A2100/2200/2300/2400 uses capillary-type thermal technology to directly measure mass flow of gases. No temperature, pressure, or square root corrections are required.
| Product Number | Display Type | Mounting Thread | Supply Current | Volumetric Flow Rate, Max |
|---|---|---|---|---|
|
|
LCD
|
Self Tap #4
|
150 mA
|
15 SLM
|
|
|
None
|
Self Tap #4
|
150 mA
|
10 SCCM
|
|
|
None
|
Self Tap #4
|
150 mA
|
20 SCCM
|
|
|
None
|
Self Tap #4
|
150 mA
|
50 SCCM
|
|
|
None
|
Self Tap #4
|
150 mA
|
100 SCCM
|
The FMA-4100/4300 Series flow rate can be displayed in 23 different volumetric flow or mass flow engineering units including a user specific selection with remote programming
| Product Number | Display Type | Volumetric Flow Rate, Max |
|---|---|---|
|
|
LCD
|
10 SLM
|
|
|
None
|
5 SCCM
|
|
|
None
|
10 SCCM
|
|
|
None
|
20 SCCM
|
|
|
None
|
50 SCCM
|
Using the basic FMA3100 thermal mass flow sensor, the FMA3200 mass flow controllers offer accurate control of gas flows in a compact package ideal for many OEM applications.
| Product Number | Display Type | Material Construction Option | Volumetric Flow Rate, Max |
|---|---|---|---|
|
|
LCD
|
Aluminum
|
20 SCCM
|
|
|
None
|
Aluminum
|
20 SCCM
|
|
|
None
|
Aluminum
|
50 SCCM
|
|
|
None
|
Aluminum
|
100 SCCM
|
|
|
None
|
Aluminum
|
200 SCCM
|
The FLR-1600A and FLV-4600A series flowmeters and controllers use two of the best studied physical properties of liquids to measure flow: Pressure and Viscosity.
| Product Number | Output Signal | Supply Voltage | Volumetric Flow Rate, Max |
|---|---|---|---|
|
|
Voltage
|
7 to 30 Vdc
|
0.5 cm³/min
|
|
|
Voltage
|
7 to 30 Vdc
|
1 cm³/min
|
|
|
Voltage
|
7 to 30 Vdc
|
10 cm³/min
|
|
|
Voltage
|
7 to 30 Vdc
|
50 cm³/min
|
|
|
Voltage
|
7 to 30 Vdc
|
2 l/min
|
The FMA-LP1600A Series mass and volumetric flowmeters use the principle of differential pressure within a laminar flow field to determine the mass flow rate.
| Product Number | Electrical Output | Output Signal | Volumetric Flow Rate, Max |
|---|---|---|---|
|
|
0 to 5 V
|
Voltage
|
0.5 SCCM
|
|
|
0 to 5 V
|
Voltage
|
1 SCCM
|
|
|
0 to 5 V
|
Voltage
|
10 SCCM
|
|
|
0 to 5 V
|
Voltage
|
50 SCCM
|
|
|
0 to 5 V
|
Voltage
|
2 SLM
|
Gas Mass Flow Meter combines a straight tube sensor with a restrictor flow element. Flow rates are not affected by temperature and pressure variations.
| Product Number | Material Construction Option | Volumetric Flow Rate, Max |
|---|---|---|
|
|
Aluminum
|
10 ml/min
|
|
|
Aluminum
|
20 ml/min
|
|
|
Aluminum
|
50 ml/min
|
|
|
Aluminum
|
100 ml/min
|
|
|
Aluminum
|
200 ml/min
|
FMA2700/FMA2800 Series Electronic Mass Flowmeters and FMA3700/FMA3800 Mass Flow Controllers are perfect for gas flow application which require an all stainless steel design
| Product Number | Display Type | Supply Current | Supply Voltage | Volumetric Flow Rate, Max |
|---|---|---|---|---|
|
|
LCD
|
150 mA
|
24 Vdc
|
10 SCCM
|
|
|
LCD
|
150 mA
|
24 Vdc
|
20 SCCM
|
|
|
LCD
|
150 mA
|
24 Vdc
|
50 SCCM
|
|
|
LCD
|
150 mA
|
24 Vdc
|
100 SCCM
|
|
|
LCD
|
150 mA
|
24 Vdc
|
200 SCCM
|
| Product Number | Helium Flow, Max | Scale Length |
|---|---|---|
|
|
65 ml/min
|
65 mm
|
|
|
120 ml/min
|
65 mm
|
|
|
5 l/min
|
150 mm
|
|
|
100 ml/min
|
150 mm
|
|
|
500 ml/min
|
150 mm
|
| Product Number | Material Construction Option | Volumetric Flow Rate, Max |
|---|---|---|
|
|
316 Stainless Steel
|
50 SCCM
|
|
|
316 Stainless Steel
|
100 SCCM
|
|
|
316 Stainless Steel
|
200 SCCM
|
|
|
316 Stainless Steel
|
500 SCCM
|
|
|
316 Stainless Steel
|
1 l/min
|
The FMA-LP2600A controller uses a proportional valve coupled to the flow body to control flow using the integral PID loop controller. 0 to 5V output (4 to 20 mA optional)
| Product Number | Output Signal | Volumetric Flow Rate, Max |
|---|---|---|
|
|
Voltage
|
0.5 SCCM
|
|
|
Voltage
|
1 SCCM
|
|
|
Voltage
|
10 SCCM
|
|
|
Voltage
|
50 SCCM
|
|
|
Voltage
|
2 SLM
|
FMA6500 Series flow controllers allow one to program, record, and analyze flow rates of various gases with a computer via an RS485 interface (optional RS232 is available).
| Product Number | Volumetric Flow Rate, Max |
|---|---|
|
|
10 SCCM
|
|
|
20 SCCM
|
|
|
50 SCCM
|
|
|
100 SCCM
|
|
|
200 SCCM
|
| Product Number | Volumetric Flow Rate, Max |
|---|---|
|
|
200 ml/min
|
|
|
1000 ml/min
|
|
|
2 l/min
|
|
|
10 l/min
|
|
|
100 l/min
|
All features of the FMA6600 and FMA6700 Series flow meters can be accessed via the local keypad and LCD. The digital interface operates via RS485 (optional RS-232 available)
| Product Number | Burst Pressure | Volumetric Flow Rate, Max |
|---|---|---|
|
|
200 psi Maximum
|
50 SCCM
|
| Product Number | Volumetric Flow Rate, Max |
|---|---|
|
|
100 ml/min
|
|
|
500 ml/min
|
|
|
1000 ml/min
|
|
|
2 l/min
|
|
|
5 l/min
|
| Product Number | Material Construction Option | Volumetric Flow Rate, Max |
|---|---|---|
|
|
Aluminum
|
10 ml/min
|
|
|
Aluminum
|
20 ml/min
|
|
|
Aluminum
|
50 ml/min
|
|
|
Aluminum
|
100 ml/min
|
|
|
Aluminum
|
200 ml/min
|
| Product Number | Process Connection Size | Volumetric Flow Rate, Max |
|---|---|---|
|
|
1 in
|
132.4 SCFM
|
Mass Flow Meters
Discover precision with our mass flow meters, offering easy installation, minimal maintenance, ...
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