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FMA6510ST

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Mass Flow Controller w/RS485 Standard and Alarm Functions
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$2,428.97

Item# FMA6510ST

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Lead Time (If not in stock): 6 weeks
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Product Specs

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Accuracy ± 1 %
Accuracy Note Accuracy (including linearity): 15 to 25°C (59 to 77°F) and 0.7 to 4 bar (10 to 60 psia): ± 1% of FS, 0 to 50°C (32 to 122°F) and 0.3 to 10 bar (5 to 150 psia): ± 2% of FS, ± 1% of FS at a specific temperature and pressure with special calibration
Additional Features 1 2 SPDT 1A Relay
Calibration NIST 10-Point Certificate
Circuit Protection Reverse polarity, Current Limit, Resettable Fuse
Control Valve Solenoid Valve
Data Interface RS485
Data Interface Note RS485, standard; RS232, optional
Display Type None
Electrical Connection Sub-D Male Miniature Connector
Electrical Output 0 to 5 V
Enclosure Ratings Inst. Level II/Poll. Degree II (IEC 60664)
Leak Rate Under Vacuum less than 10^⁻9 cc He/s
Materials, Wetted 316 Stainless Steel, 416 Stainless Steel, FKM
Media Compatibility Air, Gases, Nitrogen, Oxygen
Operating Pressure, Max 500 psi
Operating Pressure, Min 0 psi
Operating Temperature, Max 50 °C
Operating Temperature, Min 5 °C
Optimum Pressure 25 psi
Output Detail Linear 0 to 5 Vdc (2000 Ω min load impedance); 0 to 10 Vdc (4000 Ω min impedance); 4 to 20 mA optional (0 to 500 Ω loop resistance)
Output Signal Voltage
Pressure Coefficient 0.01% FS/psi
Pressure Drop, Max 1.06 psi
Pressure, Max 50 psi
Process Connection Size 1/4 in
Process Connection Type Compression Fitting
Repeatability ± 0.15%
Response Time 1 sec
Response Time Note 0.6 to 1.0 s to within ± 2% of setpoint over 20% to 100% FS
Supply Current Up to 450 mA
Supply Voltage ± 15 Vdc
Temperature Coefficient 0.05% FS/°C
Turndown Ratio 50:1
Volumetric Flow Rate, Max 200 SCCM
Volumetric Flow Rate, Min 0.2 SCCM
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Mass Flow Controller w/RS485 Standard and Alarm Functions FMA6510ST FMA6510ST
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