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FMA3000-Series
Mass Flow Controllers and Meters for All Clean Gases
Models In Stock
- For Flowrates Up To 10,000 mL/Min
- 0-5 Vdc Linear Output
- Cost Effective
FMA3000-Series
From
$
558.24
Models In Stock

Product Overview
- Accuracy ± 1.5 %
- Additional Features 1 Requires 20-micron filter
- Electrical Output 0 to 5 V
- Enclosure Ratings IP10
- Height 3.5 in
- Leak Rate Under Vacuum less than 10^⁻4 cc He/s
- Length 1.87 in
- Media Compatibility Air, Gases, Nitrogen, Oxygen
- Operating Pressure, Min 0 psi
- Operating Temperature, Max 50 °C
- Operating Temperature, Min 10 °C
- Output Detail 0 to 5 Vdc (2500 Ω minimum)
- Output Signal Voltage
- Pressure Coefficient ± 0.02%/psi
- Pressure Drop, Max 1 inH₂O
- Process Connection Type Compression Fitting
- Repeatability ± 0.5%
- Response Time 2 sec
- Response Time Note 2 seconds (typical) to within ± 2% of actual flow rate from 25 to 100% of full scale
- Supply Current 100 mA
- Supply Voltage 12 to 15 Vdc
- Temperature Coefficient ± 0.2%/°C
- Turndown Ratio 10:1
- Volumetric Flow Rate, Min 2 SCCM
- Weight 0.44 lb
- Width 1.03 in
FMA3100 Series mass flow sensors represent a breakthrough in mass flow sensor technology. State-of-the-art electronics, a compact mechanical design, and mass production tooling concepts are combined into one high- performance, cost effective product. The gas flow sensor is suitable for many OEM applications. A 0 to 5 Vdc linear output is standard.
Using the basic FMA3100 thermal mass flow sensor, the FMA3200 mass flow controllers offer accurate, stable control of gas flows in a compact package. In power-off mode, the flow control valve is closed with a minimal leak rate. This cost-effective controller is ideal for many OEM applications, with a 0 to 5 Vdc linear output and a 0 to 5 Vdc control input.
The FMA3300s combine the features of the FMA3100 with an adjustable 3½ digit LCD digital display meter for viewing flow rate in engineering units (i.e., mL/min or L/min). These compact flowmeters have proved effective in many laboratory applications.
GENERAL SPECIFICATIONS
Output: 0 to 5 Vdc (2500 Ω minimum)
Input Setpoint Voltage(FMA3200 Only): 0 to 5 Vdc
Accuracy: ± 1.5% FS*
Repeatability: ± 0.5% FS
Response Time: 2 seconds (typical) to within ± 2% of actual flow rate from 25 to 100% of full scale
Operating Ambient: 10 to 50°C (50 to 122°F), non-condensing atmosphere
Operating Pressure Range:To 150 psi maximum at 25°C (77°F)
Temperature Coefficient: ± 0.2% per °C
Pressure Coefficient: ± 0.02% per psi
Leak Integrity: 1x10-4 SCCS, He maximum to outside environments
Input Power:
FMA3100 and FMA3300: 12 to 15 Vdc, 100mA (1.5W)
FMA3200: 12 to 15 Vdc, 250 mA (3.75W)
Connections: 1/8' compression fittings, flow ranges up to 1 L/min; ¼' compression fitting for up to 5 L/min; 3/8' compression fitting for 10 L/min
Wetted Materials: Anodized aluminum, FKM O-rings, 304 and 316 SS, epoxy, acetal compression tube fittings standard
Gases: Most clean, dry gases (e.g., air, nitrogen, carbon dioxide, argon, hydrogen, helium, methane, oxygen)
Filtration: Requires 20-micron filter if gas contains any particulate matter
SPECIFICATIONS (FMA3200 Flow Controllers)
Differential Pressure: 15 to 40 psi
Valve Cycle Life: >1 million cycles; valve is normally closed
Control Range: 10:1
Remote Setpoint Voltage: 0 to 5 Vdc
Weight:
FMA3100: 199 g/0.44 lb (907 g/2.0 lb shipping)
FMA3300: 249 g/0.55 lb(1.1 kg/2.5 lb shipping)
FMA3200: 386 g/0.85 lb(1.4 kg/3 lb shipping)
Size Without Fittings (Approx.):
FMA3100: 47 x 26 x 90mm(1.87 x 1.03 x 3.55')
FMA3300: 47 x 26 x 127mm(1.87 x 1.03 x 5.0')
FMA3200: 81 x 26 x 97mm(3.17 x 1.03 x 3.80')
* Stated accuracy under Specifications valid for the following conditions:
1. Temperature between 18 and 25°C (64 and 77°F)
2. Warm-up time: at least 10 min
3. Power input voltage stable (12V ± 0.1V) typical
4. Linearity: Add ± 0.5% for ranges up to 500 mL/min, ± 1.0% over 500 mL/min
5. Accuracy range: 10 to 100%
6. Line pressure of 1 to 30 psi for FMA3100 and FMA3300, and at factory-specified settings for FMA3200
7. Factory gas (specified) is used
Read More
Using the basic FMA3100 thermal mass flow sensor, the FMA3200 mass flow controllers offer accurate, stable control of gas flows in a compact package. In power-off mode, the flow control valve is closed with a minimal leak rate. This cost-effective controller is ideal for many OEM applications, with a 0 to 5 Vdc linear output and a 0 to 5 Vdc control input.
The FMA3300s combine the features of the FMA3100 with an adjustable 3½ digit LCD digital display meter for viewing flow rate in engineering units (i.e., mL/min or L/min). These compact flowmeters have proved effective in many laboratory applications.
GENERAL SPECIFICATIONS
Output: 0 to 5 Vdc (2500 Ω minimum)
Input Setpoint Voltage(FMA3200 Only): 0 to 5 Vdc
Accuracy: ± 1.5% FS*
Repeatability: ± 0.5% FS
Response Time: 2 seconds (typical) to within ± 2% of actual flow rate from 25 to 100% of full scale
Operating Ambient: 10 to 50°C (50 to 122°F), non-condensing atmosphere
Operating Pressure Range:To 150 psi maximum at 25°C (77°F)
Temperature Coefficient: ± 0.2% per °C
Pressure Coefficient: ± 0.02% per psi
Leak Integrity: 1x10-4 SCCS, He maximum to outside environments
Input Power:
FMA3100 and FMA3300: 12 to 15 Vdc, 100mA (1.5W)
FMA3200: 12 to 15 Vdc, 250 mA (3.75W)
Connections: 1/8' compression fittings, flow ranges up to 1 L/min; ¼' compression fitting for up to 5 L/min; 3/8' compression fitting for 10 L/min
Wetted Materials: Anodized aluminum, FKM O-rings, 304 and 316 SS, epoxy, acetal compression tube fittings standard
Gases: Most clean, dry gases (e.g., air, nitrogen, carbon dioxide, argon, hydrogen, helium, methane, oxygen)
Filtration: Requires 20-micron filter if gas contains any particulate matter
SPECIFICATIONS (FMA3200 Flow Controllers)
Differential Pressure: 15 to 40 psi
Valve Cycle Life: >1 million cycles; valve is normally closed
Control Range: 10:1
Remote Setpoint Voltage: 0 to 5 Vdc
Weight:
FMA3100: 199 g/0.44 lb (907 g/2.0 lb shipping)
FMA3300: 249 g/0.55 lb(1.1 kg/2.5 lb shipping)
FMA3200: 386 g/0.85 lb(1.4 kg/3 lb shipping)
Size Without Fittings (Approx.):
FMA3100: 47 x 26 x 90mm(1.87 x 1.03 x 3.55')
FMA3300: 47 x 26 x 127mm(1.87 x 1.03 x 5.0')
FMA3200: 81 x 26 x 97mm(3.17 x 1.03 x 3.80')
* Stated accuracy under Specifications valid for the following conditions:
1. Temperature between 18 and 25°C (64 and 77°F)
2. Warm-up time: at least 10 min
3. Power input voltage stable (12V ± 0.1V) typical
4. Linearity: Add ± 0.5% for ranges up to 500 mL/min, ± 1.0% over 500 mL/min
5. Accuracy range: 10 to 100%
6. Line pressure of 1 to 30 psi for FMA3100 and FMA3300, and at factory-specified settings for FMA3200
7. Factory gas (specified) is used
PDFs & Manuals