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FMA3000-Series

Mass Flow Controllers and Meters for All Clean Gases

Models In Stock
  • For Flowrates Up To 10,000 mL/Min
  • 0-5 Vdc Linear Output
  • Cost Effective
FMA3000-Series
From $ 558.24
Models In Stock
Mass Flow Controllers and Meters for All Clean Gases FMA3000-Series FMA3000-Series
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Product Overview
  • Accuracy ± 1.5 %
  • Additional Features 1 Requires 20-micron filter
  • Electrical Output 0 to 5 V
  • Enclosure Ratings IP10
  • Height 3.5 in
  • Leak Rate Under Vacuum less than 10^⁻4 cc He/s
  • Length 1.87 in
  • Media Compatibility Air, Gases, Nitrogen, Oxygen
  • Operating Pressure, Min 0 psi
  • Operating Temperature, Max 50 °C
  • Operating Temperature, Min 10 °C
  • Output Detail 0 to 5 Vdc (2500 Ω minimum)
  • Output Signal Voltage
  • Pressure Coefficient ± 0.02%/psi
  • Pressure Drop, Max 1 inH₂O
  • Process Connection Type Compression Fitting
  • Repeatability ± 0.5%
  • Response Time 2 sec
  • Response Time Note 2 seconds (typical) to within ± 2% of actual flow rate from 25 to 100% of full scale
  • Supply Current 100 mA
  • Supply Voltage 12 to 15 Vdc
  • Temperature Coefficient ± 0.2%/°C
  • Turndown Ratio 10:1
  • Volumetric Flow Rate, Min 2 SCCM
  • Weight 0.44 lb
  • Width 1.03 in
FMA3100 Series mass flow sensors represent a breakthrough in mass flow sensor technology. State-of-the-art electronics, a compact mechanical design, and mass production tooling concepts are combined into one high- performance, cost effective product. The gas flow sensor is suitable for many OEM applications. A 0 to 5 Vdc linear output is standard.

Using the basic FMA3100 thermal mass flow sensor, the FMA3200 mass flow controllers offer accurate, stable control of gas flows in a compact package. In power-off mode, the flow control valve is closed with a minimal leak rate. This cost-effective controller is ideal for many OEM applications, with a 0 to 5 Vdc linear output and a 0 to 5 Vdc control input.

The FMA3300s combine the features of the FMA3100 with an adjustable 3½ digit LCD digital display meter for viewing flow rate in engineering units (i.e., mL/min or L/min). These compact flowmeters have proved effective in many laboratory applications.

GENERAL SPECIFICATIONS
Output: 0 to 5 Vdc (2500 Ω minimum)
Input Setpoint Voltage(FMA3200 Only): 0 to 5 Vdc
Accuracy: ± 1.5% FS*
Repeatability: ± 0.5% FS
Response Time: 2 seconds (typical) to within ± 2% of actual flow rate from 25 to 100% of full scale
Operating Ambient: 10 to 50°C (50 to 122°F), non-condensing atmosphere
Operating Pressure Range:To 150 psi maximum at 25°C (77°F)
Temperature Coefficient: ± 0.2% per °C
Pressure Coefficient: ± 0.02% per psi
Leak Integrity: 1x10-4 SCCS, He maximum to outside environments
Input Power:
FMA3100 and FMA3300: 12 to 15 Vdc, 100mA (1.5W)
FMA3200: 12 to 15 Vdc, 250 mA (3.75W)
Connections: 1/8' compression fittings, flow ranges up to 1 L/min; ¼' compression fitting for up to 5 L/min; 3/8' compression fitting for 10 L/min
Wetted Materials: Anodized aluminum, FKM O-rings, 304 and 316 SS, epoxy, acetal compression tube fittings standard
Gases: Most clean, dry gases (e.g., air, nitrogen, carbon dioxide, argon, hydrogen, helium, methane, oxygen)
Filtration: Requires 20-micron filter if gas contains any particulate matter

SPECIFICATIONS (FMA3200 Flow Controllers)
Differential Pressure: 15 to 40 psi
Valve Cycle Life: >1 million cycles; valve is normally closed
Control Range: 10:1
Remote Setpoint Voltage: 0 to 5 Vdc
Weight:
FMA3100: 199 g/0.44 lb (907 g/2.0 lb shipping)
FMA3300: 249 g/0.55 lb(1.1 kg/2.5 lb shipping)
FMA3200: 386 g/0.85 lb(1.4 kg/3 lb shipping)
Size Without Fittings (Approx.):
FMA3100: 47 x 26 x 90mm(1.87 x 1.03 x 3.55')
FMA3300: 47 x 26 x 127mm(1.87 x 1.03 x 5.0')
FMA3200: 81 x 26 x 97mm(3.17 x 1.03 x 3.80')

* Stated accuracy under Specifications valid for the following conditions:
1. Temperature between 18 and 25°C (64 and 77°F)
2. Warm-up time: at least 10 min
3. Power input voltage stable (12V ± 0.1V) typical
4. Linearity: Add ± 0.5% for ranges up to 500 mL/min, ± 1.0% over 500 mL/min
5. Accuracy range: 10 to 100%
6. Line pressure of 1 to 30 psi for FMA3100 and FMA3300, and at factory-specified settings for FMA3200
7. Factory gas (specified) is used
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